Nano X3 Series 3-Axis Flexure Positioning Stage

Product Description

• Maximum travel of 4 mm for X, Y and Z axes
• Flexure design ensures smooth, continuous motion and long-term stability
• Top plate with grooves for precise alignment of multi-axis stage accessories
• Compact dimensions: 112.0×112.0 mm (excluding actuators)
• Configured with SM13/SM25 vernier micrometers with a theoretical accuracy of 10 μm on the vernier scale
• Configured with DRP series differential adjusters with a theoretical accuracy of 1 μm on the vernier scale; all adjusters are coupled to a common base to minimize crosstalk
• Modular design allows disassembly and replacement of external actuators
• Ideal for professional fiber coupling systems, fiber alignment or waveguide positioning systems

The modular design of our Nano X3 3-axis flexure stage allows actuators to be removed and replaced at any time. All actuators are directly coupled to the base, minimizing motion crosstalk in the system. The parallel flexure design delivers precise, smooth and continuous motion with negligible friction. A built-in piezoelectric drive version is also available.

 

Manual 3-Axis Flexure Stage	Nano X3-MA	Nano X3-MB	Nano X3-MC2	Nano X3-MD
Adjuster	SM13 Micrometer	SM25 Micrometer	DRP-C Differential Adjuster	DRL51-C Differential Adjuster
Coarse Feed	500 μm/rev	500 μm/rev	500 μm/rev	500 μm/rev
Fine Feed	—	—	300 μm, 50 μm/rev	300 μm, 50 μm/rev
Theoretical Accuracy	—	10 μm	10 μm (coarse), 1 μm (fine)	10 μm (coarse), 1 μm (fine)
Weight	781.6 g	946.5 g	879.1 g	899.2 g
Dimensions	112.0×112.0×62.5 mm (excl. actuators)	112.0×112.0×62.5 mm (excl. actuators)	112.0×112.0×62.5 mm (excl. actuators)	112.0×112.0×62.5 mm (excl. actuators)
Top Plate Size	60.0×60.0 mm	60.0×60.0 mm	60.0×60.0 mm	60.0×60.0 mm
Adjustable Travel	4 mm (XYZ axes)	4 mm (XYZ axes)	4 mm (XYZ axes)	4 mm (XYZ axes)
Material	7075 Aluminum Alloy	7075 Aluminum Alloy	7075 Aluminum Alloy	7075 Aluminum Alloy

 

Piezoelectric 3-Axis Flexure Stage	Nano X3-MP
Adjustable Travel	4 mm (coarse); 20 μm (piezoelectric drive)
Adjuster	SM13 Vernier Micrometer, Piezoelectric Drive
Control Mode	Open-loop
Voltage Range	0–75 V
Theoretical Resolution	20 nm
Bidirectional Repeatability	200 nm
Feed Rate	10 μm/division, 500 μm/rev
Weight	828.0 g

Technical Notes

1. Precision Actuation

The Nano X3 series flexure stages with vernier micrometer adjusters feature a 4 mm travel for X, Y and Z axes, with a maximum load capacity of 1 kg. The nominal height of the stage is 62.5 mm. The SM series coarse adjustment vernier scale has a 10 μm division, which can set a reference point for positioning in the system.

2. Piezoelectric Option

The Nano X3-MP stage is integrated with an open-loop piezoelectric drive that enables nanometer-level resolution for the stage. The piezoelectric drive provides a 20 μm travel and can be controlled by our open-loop piezoelectric controller.

3. Accessory Compatibility

A wide range of accessories is available for mounting microscope objectives, collimators, waveguides, optical fibers and various other components.

Fiber Coupling Application

The 3X-AM mounting platform bracket is widely used for building fiber launch systems, where aspheric lenses mounted on it can replace longer microscope objectives. Its surface is an ideal choice for mounting large or multiple components on flexure stage accessories.The HCS1 fiber holder features a typical clamp design and can be directly mounted on the Nano X series 3-axis stages. A central keyway extending along the top mounting surface of the stage enables quick reconfiguration of installed optical components and accessories while maintaining system alignment.

Probing Simulation

In addition to the flat top plate, the 3X-AM2 90° right-angle top platform is also available. It requires the original top plate to be removed before installation, and allows accessories such as fiber mounts to be attached to the side of the Nano X3 stage.The V-groove fiber mount can hold optical fibers with a diameter of Ø150~Ø341 μm for butt coupling to small waveguide devices, and is fixed by magnetic pressure blocks. The tapered top plate design of the mount facilitates visual inspection of the fiber-waveguide interface for users.

 

4. Easy Accessory Alignment

The standard top plate of the 3-axis stage is designed with two 3 mm wide central notches for aligning multi-axis stage accessories. It is equipped with 16×M3 threaded holes for bolt installation, 4×M2 threaded holes and 9×M4 threaded holes that provide adapter plates for mounting various other rotary and long-travel linear stages on our Nano X3 series stages. The two central slots on the stage top enable fast system reconfiguration while preserving accessory alignment. The orthogonal pattern allows switching between right-hand and left-hand operation of the stage.

Assembly

Application Examples

Engineering Drawings

3X-AM Engineering Drawing

FH-VG Engineering Drawing

HCFC Engineering Drawing

HCS1 Engineering Drawing

Nano X3 Engineering Drawing